专门为半导体应用中的泄漏检查而设计。
它具有灵活性,机动性,快速启动,高灵敏度,快速和准确的测试结果和可靠性。
Ul3000超级模型的显著优势:
·Fasterpumpdown(evacuation)timesduetohigherairpumpingspeed.
·Lowertotalcostofownership(TCO)duetolowmaintenancerootsroughingpump.
·StartleakcheckingearlierasHYDRO·Ssoftwareeliminatesthewatervaporbackground,makingitpossibletoquicklyreachsensitivemeasurementranges
·TheUL3000FabULTRAoffersalsoanimprovedsniffercapabilitybyusingthewellprovensnifferlineSL3000whichhasupto10mlength.TheSL3000hasaseparateconnectionport,thusnoconnectiontothevacuuminletisrequired.
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